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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - CMOS drivable electrostatic microactuator with large deflection

✍ Scribed by Yasuda, T.; Shimoyama, I.; Miura, H.

Book ID: 121478283
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 653 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581776

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