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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Flexural-plate-wave actuators based on PZT thin film

✍ Scribed by Luginbuhl, Ph.; Collins, S.D.; Racine, G.-A.; Gretillat, M.-A.; de Rooij, N.F.; Brooks, K.G.; Setter, N.

Book ID: 126757522
Publisher: IEEE
Year: 1997
Weight: 645 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581845

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