𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Measurements of mechanical properties of microfabricated thin films

✍ Scribed by Ogawa, H.; Suzuki, K.; Kaneko, S.; Nakano, Y.; Ishikawa, Y.; Kitahara, T.

Book ID: 127199690
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 450 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/memsys.1997.581882

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Superlubricity mechanism for micro electro mechanical systems

✍ Hirano, M.; Kuwano, H.; Weijtmans, J.W. 📂 Article 📅 1997 🏛 IEEE ⚖ 568 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Flexural-plate-wave actuators based on PZT thin film

✍ Luginbuhl, Ph.; Collins, S.D.; Racine, G.-A.; Gretillat, M.-A.; de Rooij, N.F.; 📂 Article 📅 1997 🏛 IEEE ⚖ 645 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Touch mode capacitive pressure sensors for industrial applications

✍ Ko, W.H.; Qiang Wang, 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 505 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A decade of MEMS and its future

✍ Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 708 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Glass direct bonding technology for hermetic seal package

✍ Ando, D.; Oishi, K.; Nakamura, T.; Umeda, S. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 604 KB

[IEEE IEEE The Tenth Annual Internationa

[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - A three-dimensional shape memory alloy loop actuator

✍ Nakamura, Y.; Nakamura, S.; Buchaillot, L.; Fujita, H. 📂 Article 📅 1997 🏛 IEEE 🌐 English ⚖ 441 KB