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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - A miniature silicon accelerometer with built-in damping

✍ Scribed by Terry, S.

Book ID: 125425949
Publisher: IEEE
Year: 1988
Weight: 276 KB
Category: Article
DOI: 10.1109/solsen.1988.26452

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