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[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Surface micromachined polysilicon accelerometer

✍ Scribed by Ristic, Lj.; Gutteridge, R.; Dunn, B.; Mietus, D.; Bennett, P.

Book ID: 120829776
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 284 KB
Category: Article
ISBN-13: 9780780304567
DOI: 10.1109/SOLSEN.1992.228311

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