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[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Polysilicon resonant microbeam technology for high performance sensor applications

✍ Scribed by Guckel, H.; Rypstat, C.; Nesnidal, M.; Zook, J.D.; Burns, D.W.; Arch, D.K.

Book ID: 124070807
Publisher: IEEE
Year: 1992
Tongue: English
Weight: 411 KB
Category: Article
ISBN-13: 9780780304567
DOI: 10.1109/SOLSEN.1992.228303

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