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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Silicon fusion bonding for pressure sensors

✍ Scribed by Petersen, K.; Barth, P.; Poydock, J.; Brown, J.; Mallon, J.; Bryzek, J.

Book ID: 120183709
Publisher: IEEE
Year: 1988
Weight: 426 KB
Category: Article
DOI: 10.1109/SOLSEN.1988.26462

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