𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Polysilicon microbridge fabrication using standard CMOS technology

✍ Scribed by Parameswaran, M.; Baltes, H.P.; Robinson, A.M.

Book ID: 125457962
Publisher: IEEE
Year: 1988
Weight: 291 KB
Category: Article
DOI: 10.1109/solsen.1988.26463

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE Technical Digest IEEE Solid-State

[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Surface micromachined polysilicon accelerometer

✍ Ristic, Lj.; Gutteridge, R.; Dunn, B.; Mietus, D.; Bennett, P. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 284 KB

[IEEE IEEE Technical Digest on Solid-Sta

[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Silicon-based ultrasonic Lamb-wave multisensors

✍ Wenzel, S.W.; White, R.M. 📂 Article 📅 1988 🏛 IEEE ⚖ 476 KB

[IEEE IEEE Technical Digest on Solid-Sta

[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Silicon fusion bonding for pressure sensors

✍ Petersen, K.; Barth, P.; Poydock, J.; Brown, J.; Mallon, J.; Bryzek, J. 📂 Article 📅 1988 🏛 IEEE ⚖ 426 KB

[IEEE Technical Digest IEEE Solid-State

[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Polysilicon resonant microbeam technology for high performance sensor applications

✍ Guckel, H.; Rypstat, C.; Nesnidal, M.; Zook, J.D.; Burns, D.W.; Arch, D.K. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 411 KB

[IEEE IEEE Technical Digest on Solid-Sta

[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - A miniature silicon accelerometer with built-in damping

✍ Terry, S. 📂 Article 📅 1988 🏛 IEEE ⚖ 276 KB

[IEEE Technical Digest IEEE Solid-State

[IEEE Technical Digest IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (22-25 June 1992)] Technical Digest IEEE Solid-State Sensor and Actuator Workshop - A micromachined condenser hydrophone

✍ Bernstein, J. 📂 Article 📅 1992 🏛 IEEE 🌐 English ⚖ 506 KB