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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - A constant flow-rate microvalve actuator based on silicon and micromachining technology

✍ Scribed by Park, S.; Ko, W.H.; Prahl, J.M.

Book ID: 127058838
Publisher: IEEE
Year: 1988
Weight: 228 KB
Category: Article
DOI: 10.1109/solsen.1988.26460

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