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[IEEE IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA (6-9 June 1988)] IEEE Technical Digest on Solid-State Sensor and Actuator Workshop - A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques

✍ Scribed by Jerman, J.H.; Mallinson, S.R.

Book ID: 120658055
Publisher: IEEE
Year: 1988
Weight: 274 KB
Category: Article
DOI: 10.1109/SOLSEN.1988.26422

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