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[IEEE IEEE 1998 International Interconnect Technology Conference - San Francisco, CA, USA (1-3 June 1998)] Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) - Inorganic ARC for 0.18 μm and sub-0.18 μm multilevel metal interconnects

✍ Scribed by Lee, W.W.; He, Q.; Xing, G.; Singh, A.; Zielinski, E.; Brennan, K.; Dixit, G.; Taylor, K.; Liang, C.-S.; Luttmer, J.D.; Havemann, B.

Book ID: 126687709
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 496 KB
Category: Article
ISBN-13: 9780780342859
DOI: 10.1109/IITC.1998.704758

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