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[IEEE IEEE 1998 International Interconnect Technology Conference - San Francisco, CA, USA (1-3 June 1998)] Proceedings of the IEEE 1998 International Interconnect Technology Conference (Cat. No.98EX102) - Comparative study of W-plug, Al-plug and Al-dual damascene for 0.18 μm ULSI multilevel interconnect technologies

✍ Scribed by Kikuta, K.; Takewaki, T.; Kakuhara, Y.; Fujii, K.; Hayashi, Y.

Book ID: 126688412
Publisher: IEEE
Year: 1998
Tongue: English
Weight: 463 KB
Category: Article
ISBN-13: 9780780342859
DOI: 10.1109/IITC.1998.704773

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