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[IEEE ICMTS 1998. International Conference on Microelectronic Test Structures - Kanazawa, Japan (23-26 March 1998)] ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) - Characterization and application of interconnect process parameters

✍ Scribed by Chou, A.; Chang, K.-J.; Mathews, R.; Wong, K.; Wang, T.; Wei, Y.-H.; Su, K.C.; Hsue, P.

Book ID: 126688383
Publisher: IEEE
Year: 1998
Weight: 333 KB
Category: Article
ISBN-13: 9780780343481
DOI: 10.1109/ICMTS.1998.688066

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