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[IEEE 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (27 Nov.-1 Dec. 1995)] Proceedings of 5th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Imaging of charging specimens at high beam energies in the SEM

✍ Scribed by Wong, W.K.; Phang, J.C.H.; Thong, J.T.L.

Book ID: 118142594
Publisher: IEEE
Year: 1995
Weight: 572 KB
Volume: 0
Category: Article
ISBN-13: 9780780327979
DOI: 10.1109/ipfa.1995.487595

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