𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2009 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) - San Diego, CA, USA (2009.09.9-2009.09.11)] 2009 International Conference on Simulation of Semiconductor Processes and Devices - Simulation of Layout-Dependent STI Stress and Its Impact on Circuit Performance

✍ Scribed by Yang, Liu; Li, Xiaojian; Tian, Lilin; Yu, Zhiping

Book ID: 126705309
Publisher: IEEE
Year: 2009
Weight: 554 KB
Category: Article
DOI: 10.1109/SISPAD.2009.5290196

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