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[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - A novel helium ion microscope for interconnect material imaging

✍ Scribed by Thompson, William; Ogawa, Shinichi; Stern, Lewis; Scipioni, Larry; Notte, John

Book ID: 126631870
Publisher: IEEE
Year: 2009
Weight: 439 KB
Category: Article
ISBN: 1424444926
DOI: 10.1109/IITC.2009.5090342

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