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[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Advanced Method for Measuring Ultra-Low Contact Resistivity Between Silicide and Silicon Based on Cross Bridge Kelvin Resistor

✍ Scribed by Isogai, T.; Tanaka, H.; Teramoto, A.; Goto, T.; Sugawa, S.; Ohmi, T.

Book ID: 121266860
Publisher: IEEE
Year: 2009
Weight: 158 KB
Category: Article
ISBN: 1424442591
DOI: 10.1109/ICMTS.2009.4814621

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