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[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Array Test Structure for Ultra-Thin Gate Oxide Degradation Issues

✍ Scribed by Hafkemeyer, Kristian M.; Domdey, Andreas; Schroeder, Dietmar; Krautschneider, Wolfgang H.

Book ID: 111890264
Publisher: IEEE
Year: 2009
Weight: 961 KB
Volume: 0
Category: Article
ISBN: 1424442591
DOI: 10.1109/icmts.2009.4814616

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