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[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Hermeticity testing of capacitive RF MEMS switches

✍ Scribed by van der Wel, P.J.; Stulemeijer, J.; Bielen, J.A.; Theunis, F.G.A.; den Dekker, A.; van Gils, M.A.J.; Havens, R.J.

Book ID: 118145669
Publisher: IEEE
Year: 2008
Tongue: English
Weight: 279 KB
Edition: 46
Volume: 0
Category: Article
ISBN: 1424420490
DOI: 10.1109/relphy.2008.4558991

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