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[IEEE 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Phoenix, AZ, USA (2007.04.15-2007.04.19)] 2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual - Failure Mechanisms in MEMS Based Silicon Carbide High Temperature Pressure Sensors

✍ Scribed by Okojie, R.S.; Nguyen, P.; Nguyen, V.; Savrun, E.; Lukco, D.; Buehler, J.; McCue, T.

Book ID: 125793627
Publisher: IEEE
Year: 2007
Weight: 727 KB
Category: Article
ISBN-13: 9781424409198
DOI: 10.1109/RELPHY.2007.369928

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