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[IEEE 2004 International Conference on Microelectronic Test Structures - Awaji Yumebutai, Japan (22-25 March 2004)] Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) - Recent developments in producing test-structures for use as critical dimension reference materials

✍ Scribed by Allen, R.A.; Patel, R.; Cresswell, M.W.; Murabito, C.E.; Park, B.; Edelstein, M.D.; Linholm, L.W.

Book ID: 126623365
Publisher: IEEE
Year: 2004
Weight: 402 KB
Category: Article
ISBN-13: 9780780382626
DOI: 10.1109/ICMTS.2004.1309297

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