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[IEEE 2004 International Conference on Microelectronic Test Structures - Awaji Yumebutai, Japan (22-25 March 2004)] Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) - A novel RFCMOS process monitoring test structure

✍ Scribed by Sia, C.B.; Ong, B.H.; Lim, K.M.; Yeo, K.S.; Do, M.A.; Ma, J.G.; Alam, T.

Book ID: 118176103
Publisher: IEEE
Year: 2004
Weight: 446 KB
Volume: 0
Category: Article
ISBN-13: 9780780382626
DOI: 10.1109/icmts.2004.1309299

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