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[IEEE 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - Monterey, CA, USA (17-20 March 1997)] 1997 IEEE International Conference on Microelectronic Test Structures Proceedings - On the oxide thickness extraction in deep-submicron technologies

✍ Scribed by Vincent, E.; Ghibaudo, G.; Morin, G.; Papadas, C.

Book ID: 121699927
Publisher: IEEE
Year: 1997
Weight: 413 KB
Category: Article
ISBN-13: 9780780332430
DOI: 10.1109/icmts.1997.589349

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