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[IEEE ICMTS 2002. 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (17-20 March 2003)] International Conference on Microelectronic Test Structures, 2003. - Series resistance estimation and C(V) measurements on ultra thin oxide MOS capacitors

✍ Scribed by Rideau, D.; Scheer, P.; Roy, D.; Gouget, G.; Minondo, M.; Juge, A.

Book ID: 120885860
Publisher: IEEE
Year: 2003
Weight: 391 KB
Category: Article
ISBN-13: 9780780376533
DOI: 10.1109/ICMTS.2003.1197460

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