[IEEE ICMTS 2002. 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (17-20 March 2003)] International Conference on Microelectronic Test Structures, 2003. - An integrated test chip for the complete characterization and monitoring of a 0.25μm CMOS technology that fits into five scribe line structures 150μm by 5000μm

✍ Scribed by Lefferts, R.; Jakubiec, C.

• Book ID: 118166232
• Publisher: IEEE
• Year: 2003
• Weight: 284 KB
• Volume: 0
• Category: Article
• ISBN-13: 9780780376533
• DOI: 10.1109/icmts.2003.1197382