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[IEEE 1991 International Conference on Microelectronic Test Structures - Kyoto, Japan (18-20 March 1991)] Proceedings of the 1991 International Conference on Microelectronic Test Structures - Measurement of lateral diffusion on technologies with polysilicon doping source with misalignment correction

✍ Scribed by Anguita, J.; Perello, C.; Lozano, M.; Cane, C.; Lora-Tamayo, E.

Book ID: 126631856
Publisher: IEEE
Year: 1991
Weight: 161 KB
Category: Article
ISBN-13: 9780879425883
DOI: 10.1109/ICMTS.1990.161735

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