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[IEEE 1991 International Conference on Microelectronic Test Structures - Kyoto, Japan (18-20 March 1991)] Proceedings of the 1991 International Conference on Microelectronic Test Structures - A modified sliding wire potentiometer test structure for mapping nanometer-level distances

✍ Scribed by Cresswell, M.W.; Gaitan, M.; Allen, R.A.; Linholm, L.W.

Book ID: 126690545
Publisher: IEEE
Year: 1991
Weight: 510 KB
Category: Article
ISBN-13: 9780879425883
DOI: 10.1109/ICMTS.1990.161726

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