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[IEEE 1991 International Conference on Microelectronic Test Structures - Kyoto, Japan (18-20 March 1991)] Proceedings of the 1991 International Conference on Microelectronic Test Structures - Examination of LOCOS process parameters and the measurement of effective width

✍ Scribed by Fallon, M.; Robertson, J.M.; Walton, A.J.; Holwill, R.J.

Book ID: 126724703
Publisher: IEEE
Year: 1991
Weight: 292 KB
Category: Article
ISBN-13: 9780879425883
DOI: 10.1109/ICMTS.1990.161731

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