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Hydrogen dilution effect on the properties of coplanar amorphous silicon thin-film transistors fabricated by inductively-coupled plasma CVD

โœ Scribed by Sung Ki Kim; Young Jin Choi; Kyu Sik Cho; Jin Jang


Book ID
114537719
Publisher
IEEE
Year
1999
Tongue
English
Weight
231 KB
Volume
46
Category
Article
ISSN
0018-9383

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