Humidity sensors with reactively evaporated Al2O3 films as porous dielectrics
โ Scribed by Zhi Chen; Mao-Chang Jin; Chao Zhen
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 419 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0925-4005
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๐ SIMILAR VOLUMES
Considerable demand for solid thin-film dielectrics with high dielectric constants for use in the fabrication of capacitors has been observed. In this study, polyimide (PI)/Al 2 O 3 composite films were prepared by incorporating different micron-sized โฃ-Al 2 O 3 contents into PI derived from pyromel
Al 2 O 3 /SiO 2 films have been deposited as UV antireflection coatings on 4H-SiC by electron-beam evaporation and characterized by reflection spectrum, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The reflectance of the Al 2 O 3 /SiO 2 films is 0.33% and 10 times l