✦ LIBER ✦
Capacitive humidity sensor with controlled performances, based on porous Al2O3 thin film growm on SiO2-Si substrate
✍ Scribed by G. Sberveglieri; G. Rinchetti; S. Groppelli; G. Faglia
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 497 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0925-4005
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