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Humidity- and gas-sensing properties with an Fe2O3 film sputtered on a porous Al2O3 film

✍ Scribed by Mari Fukazawa; Hideki Matuzaki; Kazuhiro Hara

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
128 KB
Volume
14
Category
Article
ISSN
0925-4005

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We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an