Influence of the deposition conditions on the optical, electrical and magnetic properties of sputtered FeAl2O3 and NiAl2O3 nanocermet films

✍ Scribed by M. Gadenne; P. Gadenne; M.T. Ramdou; J.P. Segaud; H. Lassri; R. Krishnan; C. Sella

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 438 KB
• Volume: 168
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(93)90738-z

✦ Synopsis

We reveal the influence of the deposition conditions on the physical properties of cermet films made of nanometer sized magnetic metal (# ~/~0) and alumina grains. The films were prepared by r.f. cosputtering under two typical base pressures (10 -6 and 10 -7 Torr), using either an argon plasma or an argon+ 10% hydrogen plasma under 6 x 10 -3 Torr. They present a wide range of compositions and thicknesses. Electron microprobe analysis, transmission electron microscopy and high energy electron diffraction were used to study their crystallographic and granular structure. We report the electrical d.c. conductivity, optical transmittivity with respect to wavelength, magnetization and ferromagnetic resonance as a function of the deposition conditions. These physical properties are governed to a large extent by oxidation of the metal.