High temperature pressure sensor using double SOIstructure with two Al2O3 films

✍ Scribed by Young-Tae Lee; Heedon Seo; Makoto Ishida; Shoji Kawahito; Tetsuro Nakamura

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 825 KB
• Volume: 43
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(94)80001-4