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Hole and electron trapping in ion implanted thermal oxides and SIMOX

โœ Scribed by Mrstik, B.J.; Hughes, H.L.; McMarr, P.J.; Lawrence, R.K.; Ma, D.I.; Isaacson, I.P.; Walker, R.A.

Book ID
120652045
Publisher
IEEE
Year
2000
Tongue
English
Weight
137 KB
Volume
47
Category
Article
ISSN
0018-9499

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