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High-temperature thermal nitridation and low-temperature electron-beam-enhanced nitridation of SiO2 thin films

โœ Scribed by Balland, B. ;Glachant, A. ;Ronda, A. ;Dupuy, J. C.


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
730 KB
Volume
100
Category
Article
ISSN
0031-8965

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