Low temperature plasma nitridation of thin thermal SiO2 and a silicon surface with native oxide

✍ Scribed by E. Atanassova; J. Kassabov; E. Goranova

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 984 KB
• Volume: 21
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/0026-2692(90)90003-l