✦ LIBER ✦
Constructive versus destructive effects of electron beam irradiation: an application to plasma nitridation of SiO2 thin films
✍ Scribed by A. Glachant
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 806 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.