✦ LIBER ✦

High-temperature kinetics of silicon atom oxidation by nitric oxide based on silicon, nitrogen, and oxygen atom measurements

✍ Scribed by Mick, H. J.; Matsui, H.; Roth, P.

Book ID: 111928821
Publisher: American Chemical Society
Year: 1993
Tongue: English
Weight: 447 KB
Volume: 97
Category: Article
ISSN: 0022-3654
DOI: 10.1021/j100128a016

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Nucleation kinetics of Ru on silicon oxi

Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

✍ Yim, Sung-Soo; Lee, Do-Joong; Kim, Ki-Su; Kim, Soo-Hyun; Yoon, Tae-Sik; Kim, Ki- 📂 Article 📅 2008 🏛 American Institute of Physics 🌐 English ⚖ 738 KB

High-Quality Low-Temperature Silicon Oxi

High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical

✍ Seok-Jun Won, ; Sungin Suh, ; Myung Soo Huh, ; Hyeong Joon Kim, 📂 Article 📅 2010 🏛 IEEE 🌐 English ⚖ 132 KB

Kinetics of the reactions of diatomic su

Kinetics of the reactions of diatomic sulfur with atomic oxygen, molecular oxygen, ozone, nitrous oxide, nitric oxide, and nitrogen dioxide

✍ Hills, Alan J.; Cicerone, Ralph J.; Calvert, Jack G.; Birks, John W. 📂 Article 📅 1987 🏛 American Chemical Society 🌐 English ⚖ 705 KB

Bending manipulation and measurements of

Bending manipulation and measurements of fracture strength of silicon and oxidized silicon nanowires by atomic force microscopy

✍ Stan, Gheorghe; Krylyuk, Sergiy; Davydov, Albert V.; Cook, Robert F. 📂 Article 📅 2011 🏛 Cambridge University Press 🌐 English ⚖ 514 KB

Influence of surface fluorination on the

Influence of surface fluorination on the oxidation of amorphous silicon by atomic oxygen at 300 K

✍ W.C.M. Claassen; R.W.A.H. Schmitz; J. Dieleman 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 349 KB

An in situ infrared study of the room te

An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen

✍ W.C.M. Claassen; R.W.A.H. Schmitz; J. Dieleman 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 287 KB