Study of Polycrystalline and Amorphous L
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Pleschinger, A.; Lutz, J.; Kuchar, F.; Noll, H.; Pippan, M.
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Article
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1997
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John Wiley and Sons
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English
β 181 KB
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The surface topography and structure of low-pressure chemical vapour-deposited silicon Γlms grown on the thermal oxide of (100) silicon substrates have been investigated using atomic force microscopy. The measurements have been performed on undoped as-grown samples with deposition temperatures betwe