The surface topography and structure of low-pressure chemical vapour-deposited silicon Γlms grown on the thermal oxide of (100) silicon substrates have been investigated using atomic force microscopy. The measurements have been performed on undoped as-grown samples with deposition temperatures betwe
Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy
β Scribed by Jing Jin; Zhijun Yuan; Lu Huang; Sheng Chen; Weimin Shi; Zechun Cao; Qihong Lou
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 430 KB
- Volume
- 256
- Category
- Article
- ISSN
- 0169-4332
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