✦ LIBER ✦

Micro-Raman spectroscopy characterization of polycrystalline silicon films fabricated by excimer laser crystallization

✍ Scribed by Chil-Chyuan Kuo

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 593 KB
Volume: 47
Category: Article
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2008.06.018

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Micro-Raman stress characterization of p

Micro-Raman stress characterization of polycrystalline silicon films grown at high temperature

✍ R.C. Teixeira; I. Doi; M.B.P. Zakia; J.A. Diniz; J.W. Swart 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 127 KB

Laser crystallization of amorphous silic

Laser crystallization of amorphous silicon films investigated by Raman spectroscopy and atomic force microscopy

✍ Jing Jin; Zhijun Yuan; Lu Huang; Sheng Chen; Weimin Shi; Zechun Cao; Qihong Lou 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 430 KB

Electron paramagnetic resonance and rama

Electron paramagnetic resonance and raman spectroscopy characterization of diamond films fabricated by HF CVD method

✍ K. Fabisiak; M. Szreiber; C. Uniszkiewicz; T. Runka; D. Kasprowicz 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 189 KB 👁 1 views

## Abstract Thin polycrystalline diamond films were synthesized on silicon substrate by Hot Filament Chemical Vapor Deposition (HF CVD) technique from a mixture of hydrogen and different content of methyl alcohol. A comparative study on the Electron Paramagnetic Resonance (EPR), Raman spectroscopy

One-step growth of polycrystalline silic

One-step growth of polycrystalline silicon thin films at low-temperature by ArF excimer laser-induced photo-CVD

✍ M. Elliq; E. Fogarassy; C. Fuchs; J.P. Stoquert; S. de Unamuno; B. Prévot; E.L. 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 357 KB

In-situ Auger electron spectroscopy of s

In-situ Auger electron spectroscopy of silicon thin films fabricated using ArF excimer laser-induced chemical vapor deposition and the oxidation process

✍ Katsuhiko Mutoh; Shigeru Takeyama; Yuka Yamada; Takeo Miyata 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 387 KB

Investigation of vibrational and photolu

Investigation of vibrational and photoluminescence spectra of nanocrystalline silicon by micro-Raman spectroscopy using various laser powers

✍ Phan Hong Khoi; Ngo Thi Thanh Tam; Pham Hong Duong; Nguyen Xuan Nghia 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 96 KB 👁 1 views

The Raman spectra of silicon nanocrystals embedded in silicon oxide and in porous silicon were measured at various laser powers. It was found that the Si-Si stretching Raman peak shifts to lower wavenumbers and broadens when the laser power increases. The effect is significant and reversible, i.e. t