✦ LIBER ✦
One-step growth of polycrystalline silicon thin films at low-temperature by ArF excimer laser-induced photo-CVD
✍ Scribed by M. Elliq; E. Fogarassy; C. Fuchs; J.P. Stoquert; S. de Unamuno; B. Prévot; E.L. Mathé
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 357 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0169-4332
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