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An in situ infrared study of the room temperature oxidation of silicon with atomic and molecular oxygen

✍ Scribed by W.C.M. Claassen; R.W.A.H. Schmitz; J. Dieleman

Book ID: 107925806
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 287 KB
Volume: 36
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90919-7

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