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Nucleation kinetics of Ru on silicon oxide and silicon nitride surfaces deposited by atomic layer deposition

✍ Scribed by Yim, Sung-Soo; Lee, Do-Joong; Kim, Ki-Su; Kim, Soo-Hyun; Yoon, Tae-Sik; Kim, Ki-Bum

Book ID: 127370124
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 738 KB
Volume: 103
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2938052

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