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Synthesis of silicon nitride and silicon oxide films by ion-assisted deposition

✍ Scribed by Netterfield, R. P. ;Martin, P. J. ;Sainty, W. G.

Book ID: 115334581
Publisher: The Optical Society
Year: 1986
Tongue: English
Weight: 569 KB
Volume: 25
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.25.003808

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