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Synthesis of silicon nitride films by ion beam enhanced deposition

✍ Scribed by Liu Xianghuai; Xue Bin; Zheng Zhihong; Zhou Zuyao; Zou Shichang


Book ID
113280162
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
505 KB
Volume
39
Category
Article
ISSN
0168-583X

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