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Silicon nitride films prepared by high energy ion beam enhanced deposition

✍ Scribed by J. Zemek; F. Černý; M. Závětová; M. Vaněček; V. Železný


Book ID
113285361
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
496 KB
Volume
86
Category
Article
ISSN
0168-583X

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