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Synthesis of silicon nitride films by ion-beam-enhanced deposition and their protective properties against oxidation

โœ Scribed by Shigeji Taniguchi; Toshio Shibata; Kyotaro Nakamura; Liu Xiang-Huai; Zheng Zhi-Hong; Hwang Wei; Zou Shihchang


Book ID
108025377
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
599 KB
Volume
120-121
Category
Article
ISSN
0921-5093

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