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Mechanical and tribological properties of silicon nitride films synthesized by ion beam enhanced deposition

✍ Scribed by Yuanru Chen; Shizhuo Li; Xushou Zhang; Hong Liu; Genqing Yang; Baochun Qu

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Properties and structure of silicon nitr

✍ Liu Xianghuai; Yu Yuehui; Zheng Zhihong; Huang Wei; Zou Shichang; Jin Zuqing; Ch 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 410 KB

Optical properties and microstructure of

✍ Yu Yuehui; Liu Xianghuai; Fang Ziwei; Zou Shichang 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 516 KB

Synthesis of silicon nitride films by io

✍ Liu Xianghuai; Xue Bin; Zheng Zhihong; Zhou Zuyao; Zou Shichang 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 505 KB

Tribological properties of ion beam depo

✍ Rabi S. Bhattacharya; Richard L.C. Wu; Charles S. Yust 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 480 KB

Formation of boron nitride and silicon n

✍ Feng Yiping; Jiang Binyao; Yang Genqing; Huang Wei; Zheng Zhihong; Liu Xianghuai 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 116 KB

Silicon nitride films prepared by high e

✍ J. Zemek; F. Černý; M. Závětová; M. Vaněček; V. Železný 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 496 KB